the aging mechanism of the humidity sensors has been studied . and it ~ vas proposed that dissolution effect, tunnel effect and ion-destroying effect are the main factors affecting the aging of sensors 初步探討元件老化機(jī)理,提出對(duì)元件進(jìn)行高濕電老化時(shí),濕敏膜中存在溶解效應(yīng)、通道效應(yīng)以及離子破壞效應(yīng)。